Controller capable of controlling a wide range of high-resolution stages from an open-loop Motorized Stage with 5-phase stepping motor to a 1 nm Feedback Stage.
Stage controller with built-in driver for 5-phase stepping motors, capable of 3-axis full closed-loop to open-loop control independently for each axis.
External control via USB/GP-IB/Ethernet interface, manual operation via front panel or handy terminal (JS-301, JB-401, JD-101, MD-400), and automatic control via internal program (8 banks) are available.
Full closed loop control is available when used with Precision Motorized Stages with Built-in Compact Scale.
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SHRC-203 |
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SHRC-203-M2 |
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