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Z Axis Piezo Assist Stage (Vertical Mounting)
Vertical mounting type Z-axis stage that allows fine adjustment of 20nm or less by adding a piezo assist mechanism to the manual stage. Ideal for manual stage units and systems that require high resolution position adjustment. Stage sizes 25x25, 40x40, 60x60mm are available.
◦A dedicated controller for the piezo assist stage easily perform fine adjustment without any setting. The fine adjustment of the dial type knob can be used without resistance even in combination with a micrometer head.
| Model | Stage Size(mm) | Travel(mm) | Fine tuning resolution (nm) | Travel Accuracy/Straightness(μm) | Load Capacity(N) | VS | Unit Price | Date | Cart | ||||||||||||||||||||||||||||||||
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TADC-251SZPA |
25×25 | ±3 | 20以下 | 3 | 9.8(1kgf) |
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Z Axis Piezo Assist Stage (Vertical Mounting) /TADC-251SZPA
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TADC-251SRZPA |
25×25 | ±3 | 20以下 | 3 | 9.8(1kgf) |
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Z Axis Piezo Assist Stage (Vertical Mounting) /TADC-251SRZPA
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TADC-401SZPA |
40×40 | ±6.5 | 20以下 | 3 | 9.8(1kgf) |
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Z Axis Piezo Assist Stage (Vertical Mounting) /TADC-401SZPA
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TADC-401SRZPA |
40×40 | ±6.5 | 20以下 | 3 | 9.8(1kgf) |
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Z Axis Piezo Assist Stage (Vertical Mounting) /TADC-401SRZPA
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TADC-601SZPA |
60×60 | ±6.5 | 20以下 | 3 | 9.8(1kgf) |
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Z Axis Piezo Assist Stage (Vertical Mounting) /TADC-601SZPA
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TADC-601SRZPA |
60×60 | ±6.5 | 20以下 | 3 | 9.8(1kgf) |
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Z Axis Piezo Assist Stage (Vertical Mounting) /TADC-601SRZPA
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TADC-651SRZ25-M6PA |
65×65 | ±12.5 | 20以下 | 3 | 9.8(1kgf) |
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Z Axis Piezo Assist Stage (Vertical Mounting) /TADC-651SRZ25-M6PA
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TADC-651SRZ25UUPA |
65×65 | ±12.5 | 20以下 | 3 | 9.8(1kgf) |
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Z Axis Piezo Assist Stage (Vertical Mounting) /TADC-651SRZ25UUPA
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