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Vacuum Compatible Motorized Stages >
Vacuum Compatible Motorized Stages
Motorized SGSP stages modified for use in high vacuum.
◦Linear stages have available travel between 35 − 200mm and has a similar footprint to the SGSP series.
| Model | Stage Size(mm) | Travel(mm) | Positional Repeatability(μm) | Resolution (whole step/half step)[μm/pulse] | Load Capacity(N) | VS | Unit Price | Date | Cart | ||||||||||||||||||||||||
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VSGSP20-35(X) |
60×60 | 35 | 5 | 2/1 | 39.2（4.0kgf） |
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/VSGSP20-35(X)
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VSGSP20-85(X) |
60×60 | 85 | 5 | 2/1 | 39.2（4.0kgf） |
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/VSGSP20-85(X)
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VSGSP26-200(X) |
80×80 | 200 | 10 | 4/2 | 58.8（6.0kgf） |
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/VSGSP26-200(X)
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