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Sigma Fine (Piezo) Stages (high stiffness type)
Nanometer resolution high stiffness flexure stages.
◦These compact piezo stages offer high precision and high resolution positioning by utilizing full closed loop control with digital frequency based sensors.
◦Using piezo element actuators, open loop travel between 90μm − 100μm is available, with minimum incremental motion as small as 1nm. Compared to the open-loop control, the maximum travel of closed-loop control will be less about 20%.
◦Closed loop travel is 80% of the open loop maximum and closed loop resolution is 10nm.
◦Recommended controllers are the FINE series controllers. Both digital and analog inputs are available.
| Model | Travel (at open-loop control)(μm) | Stage Size(mm) | Actuator | Theoretical Resolution(open-loop)(nm) | Resolution(closed-loop)(nm) | VS | Unit Price | Date | Cart | ||||||||||||||||||||||||||
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SFS-H40X(CL) |
90±15％ | 40×40 | 压电陶瓷 | 1 | 10 |
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/SFS-H40X(CL)
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SFS-H40Z(CL) |
100±15％ | 40×40 | 压电陶瓷 | 1 | 10 |
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/SFS-H40Z(CL)
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SFS-H60X(CL) |
100±15％ | 60×60 | 压电陶瓷 | 1 | 10 |
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/SFS-H60X(CL)
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SFS-H60XY(CL) |
100±15％ | 60×60 | 压电陶瓷 | 1 | 10 |
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/SFS-H60XY(CL)
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SFS-H60Z(CL) |
100±15％ | 60×60 | 压电陶瓷 | 1 | 10 |
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/SFS-H60Z(CL)
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SFS-H60XYZ(CL) |
100±15％ | 60×60 | 压电陶瓷 | 1 | 10 |
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/SFS-H60XYZ(CL)
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