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XY Piezo Stages Aperture Type

Introduction

Two Axis Nanometer resolution high stiffness flexure stages with central aperture.

Producer：

Description

◦High precision XY piezo stages offer high precision and high resolution positioning by utilizing full closed loop control with digital frequency based sensors.
◦50mm x 50mm aperture makes these stages ideal for microscopy applications
◦Using piezo element actuators, open loop travel between 90μm − 100μm is available, with minimum incremental motion as small as 1nm.
◦Closed loop travel is 80% of the open loop maximum and closed loop resolution is 10nm.
◦Recommended controller is the FINE-503(＊＊).

Model

Travel (at open-loop control)(μm)

Stage Size(mm)

Actuator

Theoretical Resolution(open-loop)(nm)

Resolution(closed-loop)(nm)

Unit Price

Date

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SFS-120XY(WA)