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Precision Motorized Stages with Built-in Compact Scale

Introduction

Precision motorized stages with built-in compact optical scales make highly accurate and reliable full closed loop system using Sigma-Koki controllers (SHOT-302GS/304GS, HIT-M・HIT-S).


Producer:
Description
Description

◦U-shaped guide rail offers light weight, and minimized deflection to achieve high stiffness.
◦Includes a compact scale built in while keeping the installation space the same as that of the equivalent open loop OSMS series.

Model Stage Size(mm) Travel(mm) Positioning Accuracy(μm) Positional Repeatability(μm) Resolution (whole step/half step)[μm/pulse] VS Unit Price Date Cart
OSMS(CS)26-100(X)
100×100 100 10 3 4/2
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/OSMS(CS)26-100(X)
OSMS(CS)26-100(X)-M6
120×120 100 10 3 4/2
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/OSMS(CS)26-100(X)-M6
OSMS(CS)26-100(X)-INCH
120×120 100 10 3 4/2
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/OSMS(CS)26-100(X)-INCH
OSMS(CS)26-200(X)
100×100 200 15 3 4/2
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/OSMS(CS)26-200(X)
OSMS(CS)26-200(X)-M6
120×120 200 15 3 4/2
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/OSMS(CS)26-200(X)-M6
OSMS(CS)26-200(X)-INCH
120×120 200 15 3 4/2
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/OSMS(CS)26-200(X)-INCH
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