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Grating ruler electric control slide table >
Precision Motorized Stages with Built-in Compact Scale >
5nm Feedback Stage
FS-SPX is feedback stage with 5nm resolution positioning.
In-house optical linear encoder are built-in at the center of stage to detect position.
Positioning to target position, positioning repeatability and holding the position with high resolution is achieved by feedback control using position information of encoder.
There are two types of the stage which travel of 20mm and 50mm.
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FS-1020SPX |
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FS-1050SPX |
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