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Automatic slide stage >
Grating ruler electric control slide table >
Precision Motorized Stages with Built-in Compact Scale >
5nm Feedback Stage
| Model | Stage Size(mm) | Travel(mm) | Positional Repeatability(nm) | Minimum Resolution(nm) | MAXSpeed(mm/sec) | Load Capacity(N) | VS | Unit Price | Date | Cart | |||||||||||||||||||||||||
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FS-1020SPXY |
60×60 | X:20 Y:20 | ±2 | 1 | 5 | 39.2（4.0kgf） |
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5nm Feedback Stage /FS-1020SPXY
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FS-1050SPXY |
120×120 | X:50 Y:50 | ±2 | 1 | 5 | 78.4（8.0kgf） |
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5nm Feedback Stage /FS-1050SPXY
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